Plasma is known as the fouth state of matter. Adding energy to matter will bring it from solid to liquid, from liquid to gas, and from gas to plasma.
In low pressure plasma equipment a stable and effective plasma is created by an electromagnetic discharge of a gas at low pressure. Although all systems have the same building blocks the design can be very different depending on the size and the shape of the parts.
Download full presentation on low pressure plasma. (pdf format)
Reference material:
- Low pressure plasma treatment of electronics (pdf doc.1,3 MB)
- Pretreatment for automotive engine air filter (pdf doc. 1,9 MB)